In this work, we exploit the general-purpose solver COMSOL, equipped with electrolyte and semiconductor physics modules, to implement a versatile model of potentiometric chemical sensors including arbitrarily complex surface reactions at the oxide/electrolyte interface with examples on 2D devicelevel simulations of an ISFET. Firstly, Multiphysics simulations of V TH sensitivity to pH sensing are compared with analyses based on semiconductor TCAD. Then, more complex Na + sensing experiments are examined and numerical simulations are compared against 1D electrochemical models.

Device simulations of ion-sensitive FETs with arbitrary surface chemical reactions

Mele, Leandro Julian;Palestri, Pierpaolo;Selmi, Luca
2021

Abstract

In this work, we exploit the general-purpose solver COMSOL, equipped with electrolyte and semiconductor physics modules, to implement a versatile model of potentiometric chemical sensors including arbitrarily complex surface reactions at the oxide/electrolyte interface with examples on 2D devicelevel simulations of an ISFET. Firstly, Multiphysics simulations of V TH sensitivity to pH sensing are compared with analyses based on semiconductor TCAD. Then, more complex Na + sensing experiments are examined and numerical simulations are compared against 1D electrochemical models.
978-1-6654-3745-5
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11390/1212776
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