The transfer Length Method is a well–established experimental technique to characterize the contact resistance in semiconductor devices. However, its dependability is questioned for metal–graphene contacts. We investigate in–depth the statistical error of the extracted contact resistance values and we devise strategies to limit such error and to obtain reliable results. The method has been successfully applied to samples with different contact metals.

Reliability analysis of the metal-graphene contact resistance extracted by the transfer length method

Venica, Stefano
;
Driussi, Francesco;Palestri, Pierpaolo;Selmi, Luca
2018

Abstract

The transfer Length Method is a well–established experimental technique to characterize the contact resistance in semiconductor devices. However, its dependability is questioned for metal–graphene contacts. We investigate in–depth the statistical error of the extracted contact resistance values and we devise strategies to limit such error and to obtain reliable results. The method has been successfully applied to samples with different contact metals.
978-1-5386-5069-1
978-1-5386-5071-4
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11390/1134935
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