The transfer Length Method is a well–established experimental technique to characterize the contact resistance in semiconductor devices. However, its dependability is questioned for metal–graphene contacts. We investigate in–depth the statistical error of the extracted contact resistance values and we devise strategies to limit such error and to obtain reliable results. The method has been successfully applied to samples with different contact metals.

Reliability analysis of the metal-graphene contact resistance extracted by the transfer length method

Venica, Stefano
;
Driussi, Francesco;Palestri, Pierpaolo;Selmi, Luca
2018-01-01

Abstract

The transfer Length Method is a well–established experimental technique to characterize the contact resistance in semiconductor devices. However, its dependability is questioned for metal–graphene contacts. We investigate in–depth the statistical error of the extracted contact resistance values and we devise strategies to limit such error and to obtain reliable results. The method has been successfully applied to samples with different contact metals.
2018
978-1-5386-5069-1
978-1-5386-5071-4
File in questo prodotto:
File Dimensione Formato  
venica_ICMTS_2018.pdf

non disponibili

Tipologia: Documento in Pre-print
Licenza: Non pubblico
Dimensione 918.94 kB
Formato Adobe PDF
918.94 kB Adobe PDF   Visualizza/Apri   Richiedi una copia

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11390/1134935
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 7
  • ???jsp.display-item.citation.isi??? 4
social impact