The analysis of a microelectrostatic actuator is presented, formulated by means of the so-called Discrete Geometric Approach applied to the solution of the electrostatic-elastostatic coupled problem. Numerical results computed by means of the proposed approach are compared to those coming from assessed approaches like the finite-element method (FEM) (for both the structural and the electric domains) and FEM/boundary element method (BEM) (FEM for the structure, BEM for the electric domain). A preliminary experimental validation is finally added.
Static behavior prediction of microelectrostatic Actuators by Discrete Geometric Approaches
MUNTEANU, Mircea Gheorghe;SPECOGNA, Ruben;TREVISAN, Francesco
2008-01-01
Abstract
The analysis of a microelectrostatic actuator is presented, formulated by means of the so-called Discrete Geometric Approach applied to the solution of the electrostatic-elastostatic coupled problem. Numerical results computed by means of the proposed approach are compared to those coming from assessed approaches like the finite-element method (FEM) (for both the structural and the electric domains) and FEM/boundary element method (BEM) (FEM for the structure, BEM for the electric domain). A preliminary experimental validation is finally added.File in questo prodotto:
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